deposition equipment.

Besides PLD, we offer integration of other deposition techniques such as sputtering and evaporators and various types of ion source solutions. These tools can be directly integrated in a PLD system solution or have a dedicated vacuum chamber within a cluster setup.

integration with other deposition equipment.

TSST has developed and supplies various custom deposition systems such as sputtering, evaporation and chemical vapour deposition (CVD) systems. We are highly experienced in the integration of various analysis tools in thin-film depositions systems such as RHEED (Reflection High Energy Electron Diffraction), QCM (Quartz Crystal Microbalance) and RGA (Residual Gas Analyser).

Next to that TSST has supplied other custom vacuum solutions including UHV central radial distribution chambers with TSST automation, storage chambers, vacuum suitcases.

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vacuum transfer line